Versatile Glass Processing System for Production and R&D
Industry-Leading Speed and Throughput
System Advantages
Rapid Changeover
- Automated Wafer handling
- Quick setup time
- Easy recipe management
- Tool-free changeover
- Minimal downtime
Research Capabilities
- Process parameter optimization
- Advanced monitoring
- Data collection & analysis
- Experimental flexibility
Quality Control
- In-situ monitoring
- Process validation
- Quality documentation
- Parameter tracking